JPH0147022B2 - - Google Patents

Info

Publication number
JPH0147022B2
JPH0147022B2 JP55105430A JP10543080A JPH0147022B2 JP H0147022 B2 JPH0147022 B2 JP H0147022B2 JP 55105430 A JP55105430 A JP 55105430A JP 10543080 A JP10543080 A JP 10543080A JP H0147022 B2 JPH0147022 B2 JP H0147022B2
Authority
JP
Japan
Prior art keywords
semiconductor layer
single crystal
insulating film
opening
crystal semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55105430A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5730372A (en
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10543080A priority Critical patent/JPS5730372A/ja
Publication of JPS5730372A publication Critical patent/JPS5730372A/ja
Publication of JPH0147022B2 publication Critical patent/JPH0147022B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Recrystallisation Techniques (AREA)
JP10543080A 1980-07-31 1980-07-31 Semiconductor device Granted JPS5730372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10543080A JPS5730372A (en) 1980-07-31 1980-07-31 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10543080A JPS5730372A (en) 1980-07-31 1980-07-31 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5730372A JPS5730372A (en) 1982-02-18
JPH0147022B2 true JPH0147022B2 (en]) 1989-10-12

Family

ID=14407374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10543080A Granted JPS5730372A (en) 1980-07-31 1980-07-31 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5730372A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772380A (en) * 1980-10-24 1982-05-06 Seiko Epson Corp Mis type semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687361A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Semiconductor device and its manufacture

Also Published As

Publication number Publication date
JPS5730372A (en) 1982-02-18

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